| FALA's reticle and wafer EFEM's transfer substrates cleanly from carrier to semiconductor process and back again in both atmospheric and vacuum environments. We tailor interfaces to OEM equipment by integrating software and hardware with robotic handlers, alignment fixtures/nests, Endeffectors (arms and grips), Class 1 enclosures, loadports, operator screens with controls, interlocks and electrical power system backbones. |
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Introduction to EFEM:
Equipment Front End Module (EFEM) is the mainstay of semiconductor automation |
EFEM Advancement:
Fala has been collaborating with leading R & D scientists on the development of EFEMs for nanoscience equipment and processes |
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