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Equipment Front End Modules |
| FALA's reticle and wafer EFEM's transfer substrates cleanly from carrier to semiconductor process and back again in both atmospheric and vacuum environments. We tailor interfaces to OEM equipment by integrating software and hardware with robotic handlers, alignment fixtures/nests, Endeffectors (arms and grips), Class 1 enclosures, loadports, operator screens with controls, interlocks and electrical power system backbones. |
Introduction to EFEM: Equipment Front End Module (EFEM) is the mainstay of semiconductor automation
EFEM Advancement: Fala has been collaborating with leading R & D scientists on the development of EFEMs for nanoscience equipment and processes
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FALA Technologies Inc.
430 Old Neighborhood Road
Kingston, NY 12401
Tel: 845-336-4000
Fax: 845-336-4030
Toll-Free: 1-888-FALATECH
Email: info@falatech.com
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